Characterization
Description: Automatic spectroscopic ellipsometer with spectral range from 190 nm to 900 nm.
Sample holder: up to 8" wafers
Resolution: 0.1 nm
Description: Manual ellipsometer for one layer thin film configurations
Sample holder: 3" wafers
Resolution: 5 nm
Description: Surface profilers for measuring thin film thickness, stress, and surface roughness
Sample holder: up to 6" wafers
Resolution: down to 10 nm
Funding: FNRS
Description: Research microscope with a wide range of incident light techniques (BF, DF, DIC, TIC) and equipped with a CCD camera.
Sample holder: up to 8"
Magnification: up to 100x
Description: Research microscope with of a wide range of incident and transmitted light techniques and equipped with a CCD camera.
Sample holder: up to 4"
Magnification: up to 100x