| User | Equipment | Start | End |
|---|---|---|---|
| André | Oxford PECVD | 08:30:00 | 15:30:00 |
| Faniel | Vacotec | 11:00:00 | 17:00:00 |
| Ma | Cleaning Standard | 13:00:00 | 15:00:00 |
| Zeng | MA6 | 14:00:00 | 16:00:00 |
| Zeng | Suss Gamma 80 | 14:00:00 | 16:00:00 |
| Meng | Sem Feg FEI XL30 | 14:00:00 | 17:00:00 |
| Ma | Oxford PECVD | 15:00:00 | 17:00:00 |
| Faniel | Suss Gamma 80 | 16:00:00 | 16:30:00 |
| Meng | Vacotec | 17:00:00 | 09:00:00 |