Silicon-Based RF Substrates
Design key components of RF and mm-wave Front-End Modules, i.e. Switches, Low-Noise Amplifiers (LNA) and Power Amplifiers (PA).
High-Quality Substrate Solutions
Need high resistivity material below the RF components. Standard (10 Ωcm) substrate is too conductive lossy and not linear enough.
Parasitic Surface Conduction (PSC) in Silicon
Decreasing the nominal doping increases resistvity in the silicon bulk, but at the interface with the SiO2 a parasitic effect takes place and severely degrades RF performance.
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Trap-Rich SOI
Introducing …
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PN-Junction Substrate
Solution to PSC involving interface implants
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Porous-Silicon
Many traps, lower permittivity (and therefore RF parasitic capacitance), post-process solution, …
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GaN on Si
(III-V and III-N materials and devices)
At mm-wave frequencies, silicon-based devices are outperformed by novel semiconductor technologies including the III-N (e.g., GaN) and III-V (e.g., InP) material systems. To reduce their cost and, potentially, environmental impact, there is a high interest in integrating these materials onto large-scale Si wafers.
Heterointegration brings plenty of previously unseen physical phenomena related to the interfaces formed by the III-V or III-N with Si and the complex multilayer material stack. These effects can lead to unwanted degradation of the devices’ performance, notably from the perspective of substrate loss and trapping [1][2].
At UCLouvain, we consider these innovative technologies with a bottom-up approach to provide engineering guidelines to our industrial partners. A fine understanding of the material physics and interfaces is gained via TCAD simulations and/or electrical measurements of multilayer substrates (MOS/MIS capacitors) [3][4]. The insights then percolate to the device level (small-signal equivalent circuit extraction, especially parasitics) and further to simple demonstrator circuits [5]. The full skillset available in our group is put to use, from the fabrication of simple test structures in our cleanroom facilities, wideband RF characterization to the design of complete circuits in state-of-the art technologies.
Gold-Doped Silicon Substrate
Many traps, lower permittivity (and therefore RF parasitic capacitance), post-process solution, …
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