This option in micro and nanosystems, joined for the master degree in electrical and electro-mechanical engineering, has as objective to introduce the student to the micro and nanofabrication techniques, to the design, to the multiphysics and the characterisation of integrated micro and nanosensors and actuators. Seen the numerous applications of MEMS and NEMS in many fields (automotive, telecoms, electronics, medical, etc.), the analysis and the study of the behavior of micro and nanostructures will be based on a multidisciplinary approach.
