Design of micro and nanosystems [ LELEC2895 ]

> https://icampus.uclouvain.be/claroline/course/index.php?cid=ELEC2895

This cursus is part of the MEMS & NEMS, Micro and Nanotechnology ELEC options. LELEC2895 is focused on the understanding and the design of micro-electromechanical devices (MEMS), on transducers (sensors, actuators) made using micro and nanofabrication technologies, to their co-integration with integrated circuits (IC), to their multiphysics simulation and characterisation, to their reliability and their interconnect.

a. Contribution of the activity to the learning outcomes of the program

1 (1.1, 1.2, 1.3),  2 (2.1, 2.2, 2.3, 2.4, 2.5),  3 (3.1, 3.2, 3.3),  4 (4.2, 4.3, 4.4),  5 (5.1, 5.2, 5.3, 5.4, 5.5, 5.6), 6 (6.1, 6.3, 6.4)

b. After this cursus, the student will be able to:

• Describe the transduction principles and scaling effects
• Understand specifications for a MEMS
• Design MEMS and NEMS and use multiphysics simulation softwares and tools
• Identify electronic circuits adapted to MEMS and NEMS
• Identify fabrication techniques required to make such devices
• Analyse the reliability of miniaturised devices
• Present (report) and defend (slides) the results of a group project (with 2 to 4 students)

The project evaluation is based on the style and content of a written report and an oral presentation made by group. The exam is an open book format.

The course is organised as following

• 8 sessions of theoretical lectures
• 3 sessions of exercices
• 2 tutorial sessions to become acquainted with the software required for the project

1. MEMS design methodology

2. Scale effects and transduction principles

3. Sensors and actuators: electrical, mechanical, thermal, optical, (bio)chemical, etc...

4. Fabrication processes

5. MEMS and CMOS technology circuits co-integration

6. Interconnections and packaging

7. Multiphysics simulations and characterizations

Supports

• Slides available on iCampus
• Reference books available at the library BST

LELEC2560 Micro and Nanofabrication Techniques is a desirable prerequisite. Basic knowledge of electronics, solid-state physics, materials science and chemistry is an advantage.