Design of micro and nanosystems [ LELEC2895 ]
5.0 crédits ECTS
30.0 h + 30.0 h
1q
| Teacher(s) |
Pardoen Thomas ;
Francis Laurent (coordinator) ;
Raskin Jean-Pierre ;
Flandre Denis ;
|
| Language |
French
|
Place
of the course |
Louvain-la-Neuve
|
| Main themes |
See "main themes"
|
| Aims |
At the end of the course the students will be able to:
. design MEMS including the sensor, transducer as well as associated electronics,
. use of unumerical and analytical multi-physics simulation tools for designing and optimizing the microsystem performance,
. take into account the packaging and test issues at early stage of the MEMS design
|
| Content |
1. Approach to MEMS design
2. Transduction principles
3. Sensors and actuators : electrical, mechanical, thermal, optical, (bio)chemical, etc.
4. Co-integration MEMS-CMOS electronics
5. Low-power low-noise read-out electronics
6. Interconnection (electrical as well as fluidic) and packaging
7. Multi-physics simulation tools and characterization
8. Reliability issues
|
| Other information |
Teaching methods:
About 8 classroom lectures will be given for providing the theroretical background. Afterwards the students will make a project in groups of 2-3 students depending on the chosen subjects related to the design of MEMS or NEMS.
Prerequisites:
Basic knowledges in electronics, solid-state physics, material science and chemistry as well as micro and nanofabrication
|
Cycle et année
d'étude |
> Master [120] in Electrical Engineering
> Master [120] in Electro-mechanical Engineering
> Master [120] in Chemical and Materials Engineering
> Master [120] in Physical Engineering
|
Faculty or entity
in charge |
> ELEC
|
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