Catalogue

Name : Prober Polytec

Short description : MSA-500 Micro System Analyzer is a powerful new all-in-one measurement workstation for precise 3-D dynamic characterization of MEMS and MOEMS microstructures.
* Characterize out-of-plane vibrations by Scanning Laser-Doppler Vibrometry ;
* Measure in-plane motion and vibration by Stroboscopic Video Microscopy ;
* Determine surface topography by White Light Interferometry ;
* Test wafers and individual die by combining Polytec's MSA-500 with a MEMS probe station .
 

Localisation : Welcome

Personne(s) ressource(s) : Benoit Hubert, Loïc Lahaye, Ottilie Bonfanti,