Equipments catalogue

Name : Prober Cryo_CPX

Short description : The CPX is a versatile cryogenic micromanipulated probe station used for non-destructive testing of devices on full and partial wafers up to 51 mm (2 in) in diameter. The CPX is a platform for measurement of electrical, electro-optical, parametric, high Z, DC, RF, and microwave properties of materials and test devices. Nanoscale electronics, quantum wires and dots, and semiconductors are typical materials measured in a CPX. The CPX operates over a temperature range of 4.2 K to 475 K. The probe station provides efficient temperature operation and control with a continuous refrigeration system using either helium or nitrogen. Vapor-cooled shielding optimizes efficiency and intercepts blackbody radiation before it reaches the sample. A control heater on the sample stage along with the radiation shield heaters provide the probe station with fast thermal response.

Localisation : Welcome

Personne(s) ressource(s) : Martin Vanbrabant, Pascal Simon, Benoit Hubert,