Catalogue
Name : Prober Sunlab sheet resistance scanner
Short description : Sunlab Sherescan High resolution (selective) emitter sheet resistance mapping.
Features :Measurement range : 10-200 Ohms/sqWafer dimensions & shapes : max 210mm, thickness 100-1000 µm, square, semi square, round
Four point probe : Jandel cylindrical probe head, pin spacing 0,635 mm, load(per needle) 100g, needle radius 100µm
Wafer fixation : vacuum
Localisation : ESD BENCH 9
Personne(s) ressource(s) : Benoit Hubert, Pascal Simon,