Design of micro and nanosystems

lelec2895  2022-2023  Louvain-la-Neuve

Design of micro and nanosystems
5.00 credits
30.0 h + 30.0 h
Q1
Teacher(s)
Francis Laurent;
Language
Main themes
This cursus is part of the MEMS & NEMS, Micro and Nanotechnology ELEC options. LELEC2895 is focused on the understanding and the design of micro-electromechanical devices (MEMS), on transducers (sensors, actuators) made using micro and nanofabrication technologies, to their co-integration with integrated circuits (IC), to their multiphysics simulation and characterisation, to their reliability and their interconnect.
Learning outcomes

At the end of this learning unit, the student is able to :

1 With respect to the AA referring system defined for the Master in Electrical Engineering, the course contributes to the develoopment, mastery and assessment of the following skills :
  • AA1.1, AA1.2, AA1.3
  • AA2.1, AA2.2, AA2.3, AA2.4, AA2.5
  • AA3.1, AA3.2, AA3.3
  • AA4.2, AA4.3, AA4.4
  • AA5.1, AA5.2, AA5.3, AA5.4, AA5.5, AA5.6
  • AA6.1, AA6.3, AA6.4
After this course, the student will be able to:
  • Describe the transduction principles and scaling effects
  • Understand specifications for a MEMS
  • Design MEMS and NEMS and use multiphysics simulation softwares and tools
  • Identify electronic circuits adapted to MEMS and NEMS
  • Identify fabrication techniques required to make such devices
  • Analyse the reliability of miniaturised devices
  • Present (report) and defend (slides) the results of a group project (with 2 to 4 students)
 
Content
1. MEMS design methodology
2. Scale effects and transduction principles
3. Sensors and actuators: electrical, mechanical, thermal, optical, (bio)chemical, etc...
4. Fabrication processes
5. Selection of electronic interface circuits
6. Multiphysics simulations 
Teaching methods
The course is organised as following
  • 10 sessions of theoretical lectures, based on flipped classes helped by the resolution in students group of numerous examples and cases
  • 1 tutorial session related to the software tools 
  • 3 sessions of design practical works, with teaching support
  • 1 industrial seminar
Evaluation methods
The course is subject to continuous evaluation for 3/5 of the final grade during the semester when submitting group work reports on the practical work sessions, and for 2/5 by an individual oral examination in session, unless the mark of the individual oral examination is less than 10/20 in which case the final mark will be that of the individual oral examination only. The in-session exam is an open book exam assisted by a written preparation.The group work note is kept for all sessions of the same academic year. 
Other information
LELEC2560 Micro and Nanofabrication Techniques is a desirable prerequisite. Basic knowledge of electronics, solid-state physics, materials science and chemistry is an advantage.
Bibliography
Supports
  • Transparents disponibles sur Moodle/Slides available on Moodle
  • Livre de référence disponible à la Bibliothèque des Sciences et Technologies/Reference book available at the Science and Technology Library (Ville Kaajakari, "Practical MEMS", Small Gear Publishing)
Teaching materials
  • http://www.kaajakari.net/PracticalMEMS
Faculty or entity
ELEC


Programmes / formations proposant cette unité d'enseignement (UE)

Title of the programme
Sigle
Credits
Prerequisites
Learning outcomes
Master [120] in Chemical and Materials Engineering

Master [120] in Electrical Engineering

Master [120] in Physical Engineering

Advanced Master in Nanotechnologies