Design of micro and nanosystems

lelec2895  2019-2020  Louvain-la-Neuve

Design of micro and nanosystems
Note from June 29, 2020
Although we do not yet know how long the social distancing related to the Covid-19 pandemic will last, and regardless of the changes that had to be made in the evaluation of the June 2020 session in relation to what is provided for in this learning unit description, new learnig unit evaluation methods may still be adopted by the teachers; details of these methods have been - or will be - communicated to the students by the teachers, as soon as possible.
5 credits
30.0 h + 30.0 h
Francis Laurent;
Main themes
This cursus is part of the MEMS & NEMS, Micro and Nanotechnology ELEC options. LELEC2895 is focused on the understanding and the design of micro-electromechanical devices (MEMS), on transducers (sensors, actuators) made using micro and nanofabrication technologies, to their co-integration with integrated circuits (IC), to their multiphysics simulation and characterisation, to their reliability and their interconnect.

At the end of this learning unit, the student is able to :

1 With respect to the AA referring system defined for the Master in Electrical Engineering, the course contributes to the develoopment, mastery and assessment of the following skills :
  • AA1.1, AA1.2, AA1.3
  • AA2.1, AA2.2, AA2.3, AA2.4, AA2.5
  • AA3.1, AA3.2, AA3.3
  • AA4.2, AA4.3, AA4.4
  • AA5.1, AA5.2, AA5.3, AA5.4, AA5.5, AA5.6
  • AA6.1, AA6.3, AA6.4
After this course, the student will be able to:
  • Describe the transduction principles and scaling effects
  • Understand specifications for a MEMS
  • Design MEMS and NEMS and use multiphysics simulation softwares and tools
  • Identify electronic circuits adapted to MEMS and NEMS
  • Identify fabrication techniques required to make such devices
  • Analyse the reliability of miniaturised devices
  • Present (report) and defend (slides) the results of a group project (with 2 to 4 students)

The contribution of this Teaching Unit to the development and command of the skills and learning outcomes of the programme(s) can be accessed at the end of this sheet, in the section entitled “Programmes/courses offering this Teaching Unit”.
1. MEMS design methodology
2. Scale effects and transduction principles
3. Sensors and actuators: electrical, mechanical, thermal, optical, (bio)chemical, etc...
4. Fabrication processes
5. Selection of electronic interface circuits
6. Multiphysics simulations 
Teaching methods
The course is organised as following
  • 10 sessions of theoretical lectures, based on flipped classes helped by the resolution in students group of numerous examples and cases
  • 1 tutorial session related to the software tools 
  • 3 sessions of design practical works, with teaching support
  • 1 industrial seminar
Evaluation methods
The course is subject to continuous evaluation for 2/3 of the final grade during the semester when submitting group work reports on the practical work sessions, and for 1/3 by an individual oral examination in session. The in-session exam is a closed book exam but is assisted by the course form. The distribution of marks may be waived in the event of a noticeable difference in performance between the written work and the final oral performance, in which case only the latter's mark will be considered. 
Other information
LELEC2560 Micro and Nanofabrication Techniques is a desirable prerequisite. Basic knowledge of electronics, solid-state physics, materials science and chemistry is an advantage.
  • Transparents disponibles sur Moodle/Slides available on Moodle
  • Livre de référence disponible à la Bibliothèque des Sciences et Technologies/Reference book available at the Science and Technology Library (Ville Kaajakari, "Practical MEMS", Small Gear Publishing)
Teaching materials
  • Ville Kaajakari, Practical MEMS
  • Ville Kaajakari, Practical MEMS
Faculty or entity

Programmes / formations proposant cette unité d'enseignement (UE)

Title of the programme
Master [120] in Physical Engineering

Master [120] in Electrical Engineering

Master [120] in Chemical and Materials Engineering