Micro and Nanofabrication Techniques [ LELEC2560 ]

iCampus

Processing of micro and nanoscopic devices, MEMs, NEMs, and integrated circuits :

• - semiconductor materials and their processing,
• - oxidation, ion implantation ionique, doping, metallisation, plasma...
• - micro & nanolithography, laser machining, etc.
• - micro & nanocharacterisation : SEM, AFM, Ellipsometry, Dektak,...

With respect to the AA referring system defined for the Master in Electrical Engineering, the course contributes to the development, mastery and assessment of the following skills :

• AA1.1, AA1.2, AA1.3
• AA2.1, AA2.2, AA2.3, AA2.4, AA2.5
• AA3.1 , AA3.2, AA3.3
• AA4.1, AA4.2, AA4.3, AA4.4
• AA5.1, AA5.2, AA5.3, AA5.4, AA5.5, AA5.6
• AA6.1, AA6.3

At the end of this course, students will be able to :

• Design the process of a particular micro & nanoscopic device.
• Use process simulation tools
• Make specific process steps in the clean rooms
• Characterize step results in WinFab and Welcome platforms

The contribution of this Teaching Unit to the development and command of the skills and learning outcomes of the programme(s) can be accessed at the end of this sheet, in the section entitled “Programmes/courses offering this Teaching Unit”.

Report and oral exam in group

A few courses set the ground of major processing techniques. Students then choose a project and design a process based on available informations (iCampus) and bibliography. They interact frequently with a researcher in the field. They finally realize & characterize  the designed steps in WinFab and Welcome.

A first step, using simulation tools, allows students to get familiar with processing and characterization of devices..

A second step, in the clean rooms, give the opportunity to realize a few key processing steps, and characterize them.

See iCampus course site