Micro and nanofabrication techniques [ LELEC2560 ]

> https://icampus.uclouvain.be/claroline/course/index.php?cid=LELEC2560

Processing of micro and nanoscopic devices, MEMs, NEMs, and integrated circuits :

• - semiconductor materials and their processing,
• - oxidation, ion implantation ionique, doping, metallisation, plasma...
• - micro & nanolithography, laser machining, etc.
• - micro & nanocharacterisation : SEM, AFM, Ellipsometry, Dektak,...

Regarding the learning outcomes of the program of "Master in Electrical Engineering", this course contributes to the development and acquisition of the following learning outcomes :

AA 1.1, 1.2, 1.3,   AA 2.1, 2.2, 2.3, 2.4, 2.5,  AA  3.1 , 3.2, 3.3,

AA 4.1, 4.2, 4.3, 4.4,  AA 5.1, 5.2, 5.3, 5.4, 5.5, 5.6, AA 6.1, 6.3
 

At the end of this course, students will be able to :

• Design the process of a particular micro & nanoscopic device.
• Use process simulation tools
• Make specific process steps in the clean rooms
• Characterize step results in WinFab and Welcome platforms

Report and oral exam in group

A few courses set the ground of major processing techniques. Students then choose a project and design a process based on available informations (iCampus) and bibliography. They interact frequently with a researcher in the field. They finally realize & characterize  the designed steps in WinFab and Welcome.

A first step, using simulation tools, allows students to get familiar with processing and characterization of devices..

A second step, in the clean rooms, give the opportunity to realize a few key processing steps, and characterize them.

See iCampus course site