Design of micro and nanosystems
[ELEC2895]
[30h + 30h] 5 credits
This course is taught in the 1st semester.
Teacher(s): Denis Flandre, Laurent Francis, Laurent Francis(coord.), Laurent Francis(supplée Jean-Pierre Raskin), Thomas Pardoen, Jean-Pierre Raskin
Language: English
Level: Second
Aims
. design MEMS including the sensor, transducer as well as associated electronics,
. use of unumerical and analytical multi-physics simulation tools for designing and optimizing the microsystem performance,
. take into account the packaging and test issues at early stage of the MEMS design
Main themes
Content and teaching methods
2. Transduction principles
3. Sensors and actuators : electrical, mechanical, thermal, optical, (bio)chemical, etc.
4. Co-integration MEMS-CMOS electronics
5. Low-power low-noise read-out electronics
6. Interconnection (electrical as well as fluidic) and packaging
7. Multi-physics simulation tools and characterization
8. Reliability issues
Other information (prerequisite, evaluation (assessment methods), course materials recommended readings, ...)
About 8 classroom lectures will be given for providing the theroretical background. Afterwards the students will make a project in groups of 2-3 students depending on the chosen subjects related to the design of MEMS or NEMS.
Prerequisites:
Basic knowledges in electronics, solid-state physics, material science and chemistry as well as micro and nanofabrication