Equipments catalogue

Name : Prober Sunlab sheet resistance scanner

Short description : Sunlab Sherescan High resolution (selective) emitter sheet resistance mapping.

Features :

Measurement range : 10-200 Ohms/sq
Wafer dimensions & shapes : max 210mm, thickness 100-1000 µm, square, semi square, round
Four point probe : Jandel cylindrical probe head, pin spacing 0,635 mm, load(per needle) 100g, needle radius 100µm
Wafer fixation : vacuum

Localisation : ESD BENCH 9

Personne(s) ressource(s) : Benoit Hubert, Pascal Simon,