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Design of micro and nanosystems [ LELEC2895 ]


5.0 crédits ECTS  30.0 h + 30.0 h   1q 

Teacher(s) Pardoen Thomas ; Francis Laurent (coordinator) ; Raskin Jean-Pierre ; Flandre Denis ;
Language French
Place
of the course
Louvain-la-Neuve
Main themes See "main themes"
Aims At the end of the course the students will be able to: . design MEMS including the sensor, transducer as well as associated electronics, . use of unumerical and analytical multi-physics simulation tools for designing and optimizing the microsystem performance, . take into account the packaging and test issues at early stage of the MEMS design
Content 1. Approach to MEMS design 2. Transduction principles 3. Sensors and actuators : electrical, mechanical, thermal, optical, (bio)chemical, etc. 4. Co-integration MEMS-CMOS electronics 5. Low-power low-noise read-out electronics 6. Interconnection (electrical as well as fluidic) and packaging 7. Multi-physics simulation tools and characterization 8. Reliability issues
Other information Teaching methods: About 8 classroom lectures will be given for providing the theroretical background. Afterwards the students will make a project in groups of 2-3 students depending on the chosen subjects related to the design of MEMS or NEMS. Prerequisites: Basic knowledges in electronics, solid-state physics, material science and chemistry as well as micro and nanofabrication
Cycle et année
d'étude
> Master [120] in Electrical Engineering
> Master [120] in Chemical and Materials Engineering
> Master [120] in Electro-mechanical Engineering
> Master [120] in Physical Engineering
Faculty or entity
in charge
> ELEC


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