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MICRO AND NANOFABRICATION TECHNIQUES [ LELEC2560 ]


5.0 crédits ECTS  30.0 h + 30.0 h   2q 

Teacher(s) Raskin Jean-Pierre ; Bayot Vincent (coordinator) ; Flandre Denis ; Francis Laurent ;
Language English
Place
of the course
Louvain-la-Neuve
Main themes Identical to the contents of the course
Aims At the end of the course, the students will be able to : - understand the fabrication processes of electronic and electromechanical devices at micro and nanometer scales, - use the numerical simulation tools for running and optimizing fabrication processes, - make themselves micro and nanofabrication steps in cleanrooms
Content The content of this course is the following : decription of fabrication processes for semiconductor integrated devices and circuits, material deposition methods, oxidation, implantation, doping, photolithography, electron-beam lithography, wet ande dry etching, plasma surface treatments, etc. A first project based on the use of numerial simulation tools will help the students to learn more about modelling of fabrication procedures and characterization of integrated devices. The students will have the opportunity to realize some key fabrication steps of a particular complete process flow in the cleanroom facilities during a second project.
Other information 5-6 classroom lectures will be given about the main micro and nanofabrication as well as characterization (electrical and physical) techniques. Afterwards, the students will make 2 projects in groups of 2-3 students depending on the chose subject : (1) process simulations, (2) fabrication/characterization in cleanrooms. Prerequisites : Basic knowledges in electronics, solid-state physics and chemistry Assessment : Oral presentation and writing of a report (about 15-20 pages written as a journal article) for the 2 projects approved by the teachers. Could be given in English
Cycle et année
d'étude
> Master [120] in Electrical Engineering
> Master [120] in Chemical and Materials Engineering
> Master [120] in Electro-mechanical Engineering
> Master [120] in Physical Engineering
> Master [120] in Biomedical Engineering
Faculty or entity
in charge
> ELEC


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